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GENERAL
INFORMATION:
The LTC WS-1000M Series
Mini Spin-Process Stations accommodate tighter spaces and smaller
budgets. This simple station is distilled to the essence of what a
true wet station must be.
Features:
-
All polypropylene
construction
(*Self-extinguishing available - see below)
- Accommodates the installation of any Laurell spin processor
- Perforated wet-deck (easily removable)
-
Wet plenum
- Exhaust Plenum with gauge
- Isolated component/drawer below for
heaters, pumps, vessels...(drawer model shown)
- Available without fume hood for more benign process requirements
Options:
- Processor exhaust interlock and control (standard on some models)
-
Heating & insitu material stirring
- Rinse to resistivity
- Drain
diverter(s)
- Vacuum loading wand
- Wafer cassette stand
- Leak
detection
- Light towers
*Advanced materials available if
required
Better
WS-1000M-CP5 - meets SEMI S93
specification for fire safety in clean room applications. CP5 meets
UL 94 V-0 fire classification. It has an excellent balance of
physical properties, chemical resistance and fire safety
Best
WS-1000M-CP7-D - a flame
retardant polypropylene formulation who's flame retardant
characteristics meet the most rigorous FMRC 4910 testing standards
for most aspects of flame retardation, self-extinguishing
characteristics and burn-through. This advanced material also meets
or exceeds test standards for low smoke generation and minimal toxic
by-products.
See our
brochure
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