GENERAL INFORMATION:
The Laurell WS-1000 Series
Spin-Process Stations allow a fully configured and tested module to
be constructed and shipped complete - requiring only the minimum of
installation time. Easy to load and operate - everything is in
convenient reach to the operator.
Typical processes for the WS-1000 include, but are not limited to:
- Coating
- Etching
- Developing
- Aqueous / Solvent
- Cleaning - Aqueous / Solvent
- Yes, Sulfuric / Peroxide (insitu mixing)
- Yes, HBr
- Temperature-controlled Developing
- Rinsing / Drying
Features:
- All polypropylene
construction
(*Self-extinguishing
available - see below)
- Accommodates the installation of any Laurell spin processor
- Perforated wet-deck (easily removable)
-
Wet plenum
- Exhaust Plenum with gauge
- Isolated component / drawer below for
heaters, pumps, vessels...
Options:
- Processor exhaust interlock and control (standard on some models)
-
Heating & insitu material stirring
- Rinse to resistivity
- Drain
diverter(s)
- Vacuum loading wand
- Wafer cassette stand
- Leak
detection
- Light towers
*Advanced materials available if
required
Better
WS-1000-CP5 - meets SEMI S93
specification for fire safety in clean room applications. CP5 meets
UL 94 V-0 fire classification. It has an excellent balance of
physical properties, chemical resistance and fire safety
Best
WS-1000-CP7-D - a flame retardant
polypropylene formulation who's flame retardant characteristics meet
the most rigorous FMRC 4910 testing standards for most aspects of
flame retardation, self-extinguishing characteristics and
burn-through. This advanced material also meets or exceeds test
standards for low smoke generation and minimal toxic by-products.
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