Baseline Parameters
3000 RPM
500
8000
1.0 µm
0.1
10.0
Target Parameters
0.8 µm
0.1
10.0
Disclaimer
This spin speed calculator is based on the principle that the thickness of a coating generally varies inversely with the square root of a corresponding spin speed. Actual results may vary significantly due to photoresist viscosity, solvent evaporation rates, humidity, and exhaust flow. Laurell Technologies makes no warranties about the results that may be obtained by using this spin speed calculator.
Required Spin Speed
0
RPM
⚠ Exceeds standard equipment limits
Side View
Resist
Silicon
0.80 µm
Si WAFER