WS-1000 Wet Station

About

The Laurell WS-1000 Series Spin-Process Stations allow a fully configured and tested module to be constructed and shipped complete - requiring only the minimum of installation time. Easy to load and operate - everything is in convenient reach to the operator.

Typical processes for the WS-1000 include, but are not limited to:

• Coating
• Etching
• Developing - Aqueous / Solvent
• Cleaning - Aqueous / Solvent
• Yes, Sulfuric / Peroxide (insitu mixing)
• Yes, HBr
• Temperature-controlled Developing
• Rinsing / Drying

Features

• All polypropylene construction (self-extinguishing available, see below)
• Accommodates the installation of any Laurell spin processor
• Perforated wet-deck (easily removable)
• Wet plenum
• Exhaust Plenum with gauge
• Isolated component / drawer below for heaters, pumps, vessels...

Options

• Processor exhaust interlock(standard on EDC models)
• Chemical Heating
• Through pressure vessel material stirring (magnetic)
• Rinse to resistivity
• Drain diverter(s)
• Vacuum loading wand
• Wafer cassette stand
• Leak detection
• Light towers

*Advanced materials available if required

Better WS-1000-CP5 - meets SEMI S93 specification for fire safety in clean room applications. CP5 meets UL 94 V-0 fire classification. It has an excellent balance of physical properties, chemical resistance and fire safety

Best WS-1000-CP7-D - a flame retardant polypropylene formulation who's flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristics and burn-through. This advanced material also meets or exceeds test standards for low smoke generation and minimal toxic by-products.

Need a smaller less elaborate station? See WS-1000M