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For Laurell Customer Use Only |
This form is for requesting process assistance
for your Laurell Spin Processor installed in a glovebox.
The information will be forwarded to a qualified
process engineer immediately upon receipt.
If your requirement is urgent, please call us
and ask for Process Assistance.
Please have your model name and serial number ready.
if not installed in a glovebox, use this form instead
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English |
Metric |
Typical
Cleanroom
Environment |
Temperature |
70° F ± 2°
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21° C ±
1° |
| Relative Humidity |
35 - 50% ± 2% |
Laurell
Processor
Requirement |
Vacuum
Required |
25" - 28" Hg |
635 - 711 mm |
CDA/N2
Required |
60 - 70 psi |
4 - 5
bar |
Power
Required |
115 VAC :
60Hz |
220-240 VAC :
50/60Hz |
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First Name:
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Last Name:
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Organization:
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Internal Mail Code:
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Street Address:
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Street Address 2:
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City:
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State (USA only):
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Zip or Postal Code:
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Country:
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Phone #:
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FAX #:
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E-Mail:
(corporate domain,
no yahoo or hotmail please) |
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Spin Processor Model
(WS-400A-6NPP-LITE):
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Serial Number #:
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Chuck Type |
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Type of Chuck: |
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Glovebox |
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Atmosphere: |
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if Other: |
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Atmospheric Pressure: |
+ pos
-
neg |
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Temperature: |
°F
°C |
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Humidity: |
% Relative Humidity |
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| Substrate:
Wafer |
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Wafer Type: |
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if Other: |
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Wafer Size: |
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Thickness
(if not SEMI standard): |
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| Substrate:
Other |
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Substrate Type: |
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if Other: |
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Thickness: |
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Weight: |
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Chemicals |
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Chemical Type: |
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if Other: |
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| Dispensing
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Dispense Method: |
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if Other: |
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Typical
Amount: |
ml or ml/minute |
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Viscosity: |
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Filtration? |
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Minimum Particle Size: |
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| Spin
Speed |
Spin Speed
Requirement |
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if Other: |
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Acceleration Rate: |
RPM/sec/sec
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Other Information/
Process Questions/
Comments/
Issues: |
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If you have a problem submitting this form,
please
fill out
and fax to: 215.699.4311
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