Specifications:

GENERAL INFORMATION: The spin processor housing has been machined from solid virgin grade materials which do not degrade or generate particles. The bowl-shaped interior forces fluid downward where it is routed directly to the rear drain. The upper plenum closes inside the base providing an overlapping seal.  A proprietary motor seal protects the motor and control electronics from chemical contamination. This unique seal has proven to be sub-micron particle-free during field testing. Nitrogen purged process chamber is standard.

OPERATION: After a substrate is loaded on to the chuck, vacuum hold-down is engaged from the side mounted control panel and the lid closed, a preprogrammed process is selected and then initiated by only a few keystrokes. Note: Many other vacuum as well as non-vacuum chucks are available some of which automatically center the wafer and allow for back-side processing.

MATERIALS: This model has been precisely machined from solid natural Polypropylene (NPP).  Polypropylene is nearly impervious to all chemical attack.  The clear flat or domed lid is ECTFE.  ECTFE coated 316 Stainless Steel screws are used in some non-wetted areas.  All of our systems are considered metal-free therefore compatible with solvents, strong bases and acids even HF, HBr, HCl etc. If you intend to continuously and for long periods of time exceed 100°C in the process chamber please indicate this requirement when specifying a system.

SAFETY: Complete electrical isolation from the operator, fool-proof door interlock, and UL & CSA approval of components assure many years of safe, trouble-free performance. An interlock prevents rotation without the vacuum switch being engaged and the door closed. PTFE will not support combustion if ignited. CE marking available.

PROCESS SAFEGUARD: The same process can not be run inadvertently on the same substrate. When a process completes, "END" is displayed and must be cleared by opening the door (presumably to change substrates) or changing programs. This feature is easily bypassed if an operator does want to run the same process twice.

MANUAL OPERATION: When in program mode (with safety interlocks satisfied), any step can be viewed, changed, or activated. This feature, exclusive to Laurell spin processors, allows for a real "hands-on" manual feel to program writing and interrogation. This ability also gives the process engineer a way to actually see immediately what is happening by single stepping the program toggling functions on and off at will until the desired result is achieved.

INCLUDED IN STANDARD LITE PRODUCT:

• One multi-size universal vacuum chuck is always included with each system. Chuck adapters make changing chucks unnecessary when holding special substrates including tiny fragments.

• The WS-400/500 Digital Process Controller has twenty programs, fifty one steps each (program sizes and steps/program can be changed)...stored in non-volatile memory.

• Corrosion-proof configuration -  (no exposed metal - therefore no degradation using strong acids or bases)

• Glovebox-ready configuration - (may be installed  in a Nitrogen or Argon filled enclosure without modification)

OPTIONS:

3KRPM - 3000 RPM - typically for rinsing/drying with non-vacuum chucks (no charge)

VAP - Oil-less Vacuum Pump (electric motor driven) typically 25 - 28 inches (~635-711mm) Hg of vacuum with a flow volume of 4.5 SCFM (0.11 Cubic Meters/Minute) @ 0" Hg

IV-PVG - Integrated Variable Pneumatic Vacuum Generator - no moving parts, easy to clean - see quotation for more details

FACILITIES REQUIRED:

N₂ PROCESS/SEAL PURGE: 60 - 70 PSI (4 - 5 bar) of Nitrogen/CDA (Clean Dry Air) is required to pressurize the labyrinth-type motor seal. This gas also purges the process chamber. The gas consumption is very low 3 cubic feet per hour (0.085 CM/Hour). 10 feet (300 cm) 1/4 inch (6 mm) diameter PE tubing is provided. 

VACUUM: 25 - 28 inches (~635-711mm) Hg of vacuum with a flow volume of 4.5 SCFM (0.11 Cubic Meters/Minute) @ 0" Hg, is suggested, 10 feet (300 cm) PE tubing is provided

POWER: 95 to 240VAC, 47/63HZ, ~300 Watts