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Laurell Home Page Laurell manufactures fine spin processors - spin coaters, spin etchers, spin developers...
Friday, May 09, 2008 
 
   
 
  • Traditional industry standard since 1st introduced in 1993 (>6,000 installed)
  • Compact control enclosure
  • Available in a remote control cabinet
  • PC interface software available but not required - see below

Automatic dispense versions support pneumatic and electrical control of valves, and other options   (shown at left)
  • Up to 8 pilot air valves can integrated into the spin housing (to actuate pneumatic valves or other options) Note: 6 series has some restrictions because of it's size.

Lite Version - Time & Speed Control only  

  • Factory upgradeable to full version at any time
  • injection port - 0.75" (~19 mm) diameter opening in center of clear ECTFE lid - ideal for manual dispense (domed lid option available in lieu of flat standard lid) 

Features include:

  • Real-time display of all program functions
  • 20 program / 51 steps per program memory storage on each controller (the number of programs and steps/program may be rearranged at the factory at no additional cost)
  • Permanent (non-volatile) setup and program storage
  • Digital readout of closed loop speed control - control resolution is < 0.5 RPM.
  • Our Repeatability specification is <0.5 RPM with no accumulation of error - SO NO CALIBRATION IS EVER NECESSARY!
  • Acceleration/deceleration rate programmable in every step
  • Vacuum and lid interlocks - display of actual vacuum at the wafer (will not allow rotation if hold-down force is insufficient) the set point is user adjustable.
  • Energy saving automatic shutdown after 10 minutes of non-use
  • Step time from 0.1 seconds to 99 minutes 59.9 seconds
  • Selectable skip-step (to quickly move forward in the process while it is running)
  • Password protected feature (to disallow program alteration by others)
  • Standard communications port for use with optional SPIN-2000 software for a Windows PC...upload, download, monitor and now initiate start / stop.

Operation:

The totally unique operator interface panel has an easily read back-lighted information display with function-oriented membrane keypad.

Programming is no more than pushing a few arrow keys while viewing the parameters change. A program can be selected and initiated with as few as two keystrokes. Each program step includes: time, speed, and an acceleration or deceleration rate. The ability to actuate eight (8) pilot air valves is included on some versions but can be added (by the factory) to the "lite" version whenever it is required. Interlocks insure that vacuum hold-down is activated before any program is run and cannot be disengaged until the wafer comes to a complete stop. A lid interlock disallows motor rotation and valve actuation if the lid is open. A design feature is also included to avoid accidentally re-running a process on the same wafer but can be easily bypassed if necessary

The process controller was designed by LTC specifically for this application, and therefore is very easy to program and use. By holding the processor in program mode a completely manual operation can be achieved for a real "hands-on feel". This functionality is helpful for setting up experiments where adjustments cannot be made dynamically.


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