Automatic dispense
versions support pneumatic and electrical control of valves, and
other options
(shown
at left)
- Up
to 8 pilot air valves can integrated into
the spin housing (to actuate pneumatic valves or other options)
Note: 6 series has some restrictions because of it's size.
Lite Version - Time &
Speed Control only
- Factory upgradeable to full
version at any time
- injection port - 0.75" (~19
mm) diameter opening in center of clear ECTFE lid - ideal for
manual dispense (domed lid option available in lieu of flat
standard lid)
Features include:
- Real-time display of all program
functions
- 20 program / 51 steps per program
memory storage on each controller (the number of programs and
steps/program may be rearranged at the factory at no additional
cost)
- Permanent (non-volatile) setup and
program storage
- Digital readout of closed loop
speed control
-
- Acceleration/deceleration rate
programmable in every step
- Vacuum and lid interlocks -
display of actual vacuum at the wafer (will not allow rotation
if hold-down force is insufficient) the set point is user
adjustable.
- Energy saving automatic shutdown
after 10 minutes of non-use
- Step time from 0.1 seconds to 99
minutes 59.9 seconds
- Selectable skip-step (to quickly
move forward in the process while it is running)
- Password protected feature (to
disallow program alteration by others)
- Standard communications port for
use with optional SPIN-2000
software for a Windows PC...upload, download, monitor and
now initiate start / stop.
Operation:
The totally unique operator interface
panel has an easily read back-lighted information display with
function-oriented membrane keypad.
Programming is no more than pushing a
few arrow keys while viewing the parameters change. A program can be
selected and initiated with as few as two keystrokes. Each program
step includes: time, speed, and an acceleration or deceleration
rate. The ability to actuate eight (8) pilot air valves is included
on some versions but can be added (by the factory) to
the "lite" version whenever it is required. Interlocks
insure that vacuum hold-down is activated before any program is run
and cannot be disengaged until the wafer comes to a complete stop. A
lid interlock disallows motor rotation and valve actuation if the
lid is open. A design feature is also included to avoid accidentally
re-running a process on the same wafer but can be easily bypassed if
necessary
The process controller was designed
by LTC specifically for this application, and therefore is very easy to
program and use. By holding the processor in program mode a
completely manual operation can be achieved for a real
"hands-on feel". This functionality is helpful for setting
up experiments where adjustments cannot be made dynamically.
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