Accessories.

Universal Dispenser (UD-2)

The result of thousands of hours of factory and field testing, the UD-Series Universal Dispenser is Laurell's best-selling dynamic dispense solution. While capable of delivering precision dispenses of less than 1ml of chemistry, the UD-2 (and the locking ball-mounted UD-2b) is both remarkably affordable and simple to use. Features include:

• Adjustable rate suck-back control
  (drip-free, bubble-free operation)
• Compatible with Spin 3000 precision software
• Compatible with syringe, pump, or pressure vessel material source
• Adjustable locking ball mounting
  (available on UD-2b configuration only)
• Available in configurations of up to 32 dispensers

The UD-2 and UD-2b are compatible with all Laurell models, and any existing Laurell system can be upgraded to accommodate them. Also see: Manual Syringe Adapter, EBR Edge Bead Removal Mounting

Dynamic Linear Dispense (DLD)

The Dynamic Linear Dispense option allows you to program a linear dispense action across the radius of a substrate. The Dynamic Linear Dispense arm, which projects out from the spin processor, actuates a dispenser across the substrate based on a set of adjustable start and end positions. Benefits of Dynamic Linear Dispense include:

• Increased precision with dynamic dispense actions
• Up to 50% decrease in chemical consumption
• Improved uniformity of coating

Dynamic Linear Dispense can be especially effective when used in tandem with our programmable exhaust feature, used to eliminate turbulence while maintaining higher vapor concentration during film creation. View the animation at right for a better idea of how Dynamic Linear Dispense works. This option is compatible with most Laurell models.

Also see: Dynamic Rotary Dispense

Dynamic Rotary Dispense (DRD)

The Dynamic Rotary Dispense option allows you to program a radial dispense action over a substrate. The Dynamic Rotary Dispense arm describes up to a 90-degree arc across a substrate based on a set of adjustable start and end positions. Benefits of Dynamic Rotary Dispense include:

• Increased precision with dynamic dispense actions
• Up to 50% decrease in chemical consumption
• Improved uniformity of coating

Dynamic Rotary Dispense can be especially effective when used in tandem with our programmable exhaust feature, used to eliminate turbulence while maintaining higher vapor concentration during film creation. This option is compatible with most Laurell models.

Also see: Dynamic Linear Dispense

Injectors

A variety of preconfigured and custom-built injectors are available to meet the requirements of your processes. Achieve optimal flow control by choosing from the many spray heads available. View the images at right to see a few possible options.

Most injectors are compatible with all Laurell models. Please include specific process requirements when requesting a quotation.

Stainless Steel Pressure Vessels

Laurell also sells stainless steel pressure vessels in two models, the SSV-1 and SSV-2. Both are compatible with all Laurell models.

SSV-1

• Capacity: 1+ gallon (5 liters)
• Dimensions: 10.5"h x 9.3" diameter

SSV-2

• Capacity: 2+ gallon (10 liters)
• Dimensions: 16"h x 9.3" diameter
• Optional electropolished finish

Teflon-Encapsulated Pressure Vessels

Laurell also sells a Teflon-encapsulated pressure vessel, the TEV-1. It is compatible with all Laurell models.

• Capacity: 1+ gallon (5 liters)
• Dimensions: 10.5"h x 9.3" diameter

Manual Syringe Adapter

The manual syringe adapter option allows for a controlled manual dispense of chemistry onto a substrate. The standard 5 ml version is shown at right. Manual syringe adapters are Compatible with all non-EDC Laurell models.

Wafer Alignment Tools

Take the guesswork out of centering your wafers with these easy-to-use tools. Available for use with substrates ranging in size from 2" to 300mm, wafer alignment tools are compatible with all Laurell models.

View animations at right for more information, or watch the wafer alignment tool demonstration video on Laurell TV or YouTube.com.